Wafer Charging Monitors, Inc.

The latest issue of WCM's newsletter, The Wafer Charging Bulletin, has already been E-mailed out to current subscribers. However, if you are not yet a subscriber or need another copy, a copy is available for viewing or downloading from this site right now.

• For viewing, we recommend you set your monitor to either 256 or more colors and use Acrobat Reader version 4.0 or higher. If you do not have Adobe® Acrobat® Reader version 4.0 or higher, you can download a free copy using the link provided near the bottom of this page.

• For printing, we suggest you use a color printer. (However, for this particular issue, a black-and-white laser printer should also produce an acceptable printout.)

Download Full text can be downloaded in PDF format and viewed with Acrobat Reader version 4.0 or higher. (You can download a free copy of Adobe® Acrobat® Reader by using the link at the bottom of this page.) (349 KB) Vol. 7, No. 1 (Fall 2004)   Feature Article:  How to avoid charging damage in IC manufacturing . . .   ·  Oxide deposition   ·  Effect of UV and charging on non-volatile ICs   ·  Etching plasmas -- "electron shading" effect   ·  Effect of substrate antennas   ·  Ion implantation   ·  Charging monitor requirements   ·  Proper use of charging and damage monitors

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