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The leading supplier of products and services for quantifying wafer charging in semiconductor process equipment including: ion implanters, ashers, etchers, and plasma deposition systems.
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Charm®-2 Monitor Wafers
200, 150, 125, 100, and 75-mm |
ChargeMap® Software
& Evaluation Services |
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Wafer Charging Monitors, Inc.
127 Marine Road
Woodside, CA 94062
U.S.A.
tel: (650) 851-9313 . . . . fax: (650) 851-2252
Copyright © 1997-2015 Wafer Charging Monitors, Inc. All rights reserved.
Last Modified: Feb. 10, 2015
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